JPH0568846B2 - - Google Patents
Info
- Publication number
- JPH0568846B2 JPH0568846B2 JP60042724A JP4272485A JPH0568846B2 JP H0568846 B2 JPH0568846 B2 JP H0568846B2 JP 60042724 A JP60042724 A JP 60042724A JP 4272485 A JP4272485 A JP 4272485A JP H0568846 B2 JPH0568846 B2 JP H0568846B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- light source
- arcuate
- circular
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005286 illumination Methods 0.000 claims description 17
- 239000013307 optical fiber Substances 0.000 claims description 11
- 238000003384 imaging method Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 description 20
- 238000010586 diagram Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60042724A JPS61202433A (ja) | 1985-03-06 | 1985-03-06 | 弧状領域照明光学装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60042724A JPS61202433A (ja) | 1985-03-06 | 1985-03-06 | 弧状領域照明光学装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61202433A JPS61202433A (ja) | 1986-09-08 |
| JPH0568846B2 true JPH0568846B2 (en]) | 1993-09-29 |
Family
ID=12644011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60042724A Granted JPS61202433A (ja) | 1985-03-06 | 1985-03-06 | 弧状領域照明光学装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61202433A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2513874Y2 (ja) * | 1991-02-08 | 1996-10-09 | 象印マホービン株式会社 | 液体容器 |
| CN103680078B (zh) * | 2013-12-11 | 2016-08-17 | 京东方科技集团股份有限公司 | 预警系统及光学设备 |
-
1985
- 1985-03-06 JP JP60042724A patent/JPS61202433A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61202433A (ja) | 1986-09-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4497015A (en) | Light illumination device | |
| JP2655465B2 (ja) | 反射型ホモジナイザーおよび反射型照明光学装置 | |
| JP3707060B2 (ja) | 照明光学装置 | |
| JPS597359A (ja) | 照明装置 | |
| USRE34634E (en) | Light illumination device | |
| JPH032284B2 (en]) | ||
| JP3278277B2 (ja) | 投影露光装置及びこれを用いたデバイス製造方法 | |
| JP2997351B2 (ja) | 照明光学装置 | |
| US5218660A (en) | Illumination device | |
| JPS62115719A (ja) | 照明光学系 | |
| JP3517573B2 (ja) | 照明装置及びそれを用いた投影露光装置 | |
| JPS5949514A (ja) | 環状照明装置 | |
| JPH0629189A (ja) | 投影式露光装置およびその方法並びに照明光学装置 | |
| JPS622539A (ja) | 照明光学系 | |
| JPH08203803A (ja) | 露光装置 | |
| JPH0568846B2 (en]) | ||
| JPS63114186A (ja) | 照明装置 | |
| JP3367569B2 (ja) | 照明光学装置、露光装置、及び該露光装置を用いた転写方法 | |
| JP3188764B2 (ja) | 照明光学系 | |
| JPS6380243A (ja) | 露光装置用照明光学装置 | |
| JPH0769576B2 (ja) | 照明光学装置 | |
| JP7068659B2 (ja) | 露光用光源装置 | |
| JPS6381420A (ja) | 照明装置 | |
| JPS622617A (ja) | 照明装置 | |
| JPH088208B2 (ja) | 照明光学系 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |